A Manufacturable AlScN Periodically Polarized Piezoelectric Film Bulk Acoustic Wave Resonator (AlScN P3F BAW) Technology

Akoustis will present a manufacturable, Periodically Polarized Piezoelectric Film (P3F) Bulk Acoustic Wave (BAW) resonator technology using Aluminum Scandium Nitride (AlScN) materials and operating in various overtone modes for applications requiring resonance frequencies extending from 8GHz to 18GHz and beyond. The P3F AlScN BAW approach fundamentally benefits from a significantly larger film thickness than traditional BAW thickness-frequency scaling approaches, enabling a manufacturable, high-coupling, high quality-factor (Q), and high-frequency resonator technology. In this workshop, we will present simulations and measured results on AlScN P3F BAW resonators and filters manufactured using XBAW®, a unique and patented transferred substrate process technology for next generation resonator and filter solutions. We will discuss and explain the P3F approach and benefits compared to traditional BAW approaches for higher-frequency filters.