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Developments in Wafer-Level Packaging for mm-Wave Communication and Radar System
System-in-Package (SiP) is a major trend in integration of microelectronic systems to tackle the increasing need for more functionality in a smaller volume. SiP leads to heterogeneous integration of integrated circuits along with sensors, microelectromechanical components, passive devices, filters and antennas. Another important trend in packaging is the continuing move toward higher frequencies. 5G high-speed wireless communication, mm-wave radar for autonomous driving and high-resolution mm-wave environment sensing and imaging are just a few examples of applications for future markets. In this talk, we present the latest developments in packaging technologies for mm-wave radar and communication systems. We demonstrate the system integration capabilities of the embedded wafer-level ball grid array (eWLB) technology. After introduction of low-loss transmission lines and high-quality planar inductors in thin-film Re-Distribution Layers (RDL), we present chip-package-board transitions without external matching networks optimized for use in the 60/70/80 GHz bands. We present the concepts of antenna integration in eWLB and show examples of different antenna structures. To demonstrate the system-in-package integration capabilities of eWLB, we show 60GHz and 77GHz eWLB transceiver modules with integrated antennas. The use of vertical interconnections and double-sided RDL extend the integration capabilities to the third dimension. We present ways of realizing vertical interconnections in eWLB using Through Encapsulate Vias (TEV) and novel Embedded Z Lines (EZL) technology. We show examples of vertical interconnections, embedded passives, RF transitions and 3D antennas realized using the TEV and EZL technology. Finally, we present the concept of Substrate Integrated Waveguide (SIW) for eWLB. To combine the advantages of planar circuits with rectangular waveguides we present a novel, compact and low-loss transition from chip to SIW in eWLB and to standard WR10 rectangular waveguide.