On-Wafer S-Parameter Measurements of Passive Planar Circuits at Cryogenic Temperatures

This talk describes recent research activities at the National Physical Laboratory (NPL) in cryogenic on-wafer S-parameter measurement. More specifically, the adaptation and improvement of a cryogenic probe station for microwave probing, and the development of bespoke calibration and verification standards. Similar work conducted by other groups will also be analysed to provide an overview of the state-of-the-art.