Silicon Micro-Machined Liquid Crystal Tunable Microwave and mm-Wave Devices

The Liquid Crystal (LC) technology is attracting significant attention from RF researchers due to its capability of analog tunability and low-loss characteristics, extending up to THz frequencies. However, existing state-of-the-art LC-based RF devices face limitations in fabrication processes, resulting in relatively large sizes. The talk addresses the use of silicon micro-machined technology for the development of highly miniaturized microwave and mm-wave devices.