Ferroelectric Material Structures for High Frequency Resonators

This talk will discuss emerging approaches for realizing miniature, high performance resonator materials and device structures in X/Ku/K bands (8–27GHz). We will begin by discussing the fundamental mechanisms degrading acoustic resonator and filter performance when scaling to X-band frequencies and beyond. Periodically poled piezoelectric films (P3F) will be presented as an approach to overcoming the fundamental frequency scaling limits of traditional acoustic resonators. P3F materials realized via electrical poling of ferroelectric Aluminum Scandium Nitride will be presented. The limits of electrical poling in terms of layer thicknesses, line widths, and poling area will be discussed. Example resonator and filter structures realized in AlScN P3F films will be presented along with achieved quality factors and coupling coefficients at different frequencies.