A Manufacturable AlScN Periodically Polarized Piezoelectric Film Bulk Acoustic Wave Resonator (AlScN P3F BAW) Technology

Akoustis will present a manufacturable, Periodically Polarized Piezoelectric Film (P3F) Bulk Acoustic Wave (BAW) resonator technology using Aluminum Scandium Nitride (AlScN) materials and operating in various overtone modes for applications requiring resonance frequencies extending from 8GHz to 18GHz and beyond. The AlScN P3F BAW technology approach was implemented at Akoustis using XBAW, a unique and patented transferred substrate process technology for next generation resonator and filter solutions and is referred to as XP3F. XP3F fundamentally benefits from a significantly larger film thickness than traditional BAW thickness-frequency scaling approaches, enabling a manufacturable, high coupling, high quality-factor (Q), and high frequency resonator technology. In this workshop, we will present simulations and measured results on XP3F AlScN resonators and filters in X and Ku-band. We will discuss and explain the XP3F approach and benefits compared to traditional BAW approaches for higher frequency filters. We will present and discuss Foundry capabilities offered by Akoustis for XBAW and XP3F technology.