On-Wafer Measurement of Planar Circuits at mm-Wave and Sub-THz Frequencies

High-frequency on-wafer S-parameter measurements present significant challenges due to various factors that can impact accuracy and consistency. Efforts are underway to address these challenges and ensure reliable measurements up to THz frequencies. This talk will highlight recent activities at several European national metrology institutes, including NPL, with a focus on an interlaboratory measurement comparison extending to 1.1THz, alongside other ongoing activities at NPL.