Non-Contact On-Wafer Probing for mm-Wave and THz Metrology

We will present recent advances for on-wafer device and material testing at mm-wave and THz bands using non-contact probing as a cost-effective and highly repeatable alternative to conventional contact probes. We will discuss the underlying theory as well as recent applications of non-contact probes that have been adapted for on-wafer calibration and testing under high vacuum for space applications and temperature-controlled environments.